|
Sr. No |
Name of the Conference/ Symposium / Workshop |
International/ National |
Place |
Date |
Paper / poster Presentations (Give Title) / attended |
|
1.
|
Advances in Materials Processing |
National |
Department of Electronics, North Maharashtra University, Jalgaon |
8th March 2014 |
Conducton mechanism in MOS devices |
|
2. |
International Summer School 2013 (SS-2013) |
International |
The University of Tokushima, Japan |
5th-11th August 2013 |
Happa Businees and waste management in India |
|
3. |
International Winter School for Graduates (IWSG 2009) |
International |
IIT Bombay, Mumbai |
30th Nov - 5 Dec, 2009 |
Attended |
|
4. |
2nd IEEE International Workshop on Electron Devices and Semiconductor Technology (IEDST-2009) |
International |
IIT Bombay, Mumbai |
1-2, June 2009 |
Attended |
|
5. |
2nd INUP Familiarization Workshop on Nanofabrication Technologies |
|
IIT Bombay, Mumbai |
30-31, May 2009 |
Attended |
Conference Publications
International conferences: 13
National conferences: 18
01) “Physical characterization of hafnium oxide for CMOS technology”, A. G. Khairnar, V.S. Patil, K.S. Agrawal, R.S. Salunke and A.M. Mahajan, presented in National Conference on NCEMTFA-2016 at JDMVPs, ACS College, Jalgaon during 9-10 December 2016, abstract published on pp 15.
02) “High Permittivity HfO2 Thin Films on Surface Passivated Germanium”, V.S. Patil, K.S. Agrawal, R.S. Salunkhe, Anil G. Khairnar and A.M. Mahajan, presented and published in proceedings of IWPSD-2015 held at IISC Bangalore during 7-10 Dec 2015 abstract published on pp. 279.
03) “Interfacial Properties of ALD-HfO2 deposited on surface nitrided Germanium (111)”, K. Agrawal, V. Patil, V.N. Barhate, A.G. Khairnar and A.M. Mahajan, presented and published in proceedings of IWPSD-2015 held at IISC Bangalore during 7-10 Dec 2015 abstract published on pp. 271.
04) “Hafnium oxide deposited by ALD on nitride passivated Ge (100) substrate”, K. Agrawal, V.S. Patil, Anil G Khairnar, A.M. Mahajan, Presented and published in proceedings of in e-MRS 2015 held at Poland during 14-17 Sept 2015.
05) “PEALD grown high-k ZrO2 tin films on SiC III-V compound semiconductor”, Anil G. Khairnar, Vilas S. Patil and A. M. Mahajan, presented and published in proceedings of 3rdInternational Symposium on Semicondutor Materials and Devices (ISSMD-3) held at Anna University, Chennai India during 2-5 February 2015 abstract published on pp. 94.
06) Effect of Annealing on Current Conduction Mechanism in High-k Dielectric Thin Films Deposited on Silicon Substrates, Anil G. Khairnar, Pranita A. Deshmukh, V. S. Patil, K. S. Agrawal and A. M. Mahajan, Presentedin Pacific Rim Symposium on Surfaces, Coatings and Interfaces (PacSurf 2014), held on December 7 through December 11, 2014 at Kohala Coast, HI, USA, abstract published on pp. 87.
07) “Metal organic decomposed cerium dioxide high-k thin films for CMOS applications”,K. S. Agrawal, V. S. Patil, A. G. Khairnar and A. M. Mahajan, presented in National conference on Advances in electronics and its interdisciplinary applications(NCAEIA-2014) held at Fergusson college, Pune on 19-20thSept 2014 abstract published on pp. 342.
08) “Comparative study of current conduction mechanism in high-k dielectric thin films deposited on silicon substrates”, Pranita A. Deshmukh, K. S. Agrawal, Anil G. Khairnar and A. M. Mahajan, presented in National Conference on 'Recent Trends in Mathematics, Physics and their Applications' (NCRTMPA - 2014), organized by the Departments of Mathematics and Physics, Shankarlal Khandelwal Arts, Science and Commerce College, Akola (M.S.) on 19th March, 2014 abstract published on pp.227.
09) “Atomic Layer Deposition system for controlled deposition of thin films in CMOS technology” Vilas S. Patil, Viral N. Barhate, Anil G. Khairnar, A. M. Mahajan presented in National Conference on 'Recent Trends in Mathematics, Physics and their Applications' (NCRTMPA - 2014), organized by the Departments of Mathematics and Physics, Shankarlal Khandelwal Arts, Science and Commerce College, Akola (M.S.) on 19th March, 2014abstract published on pp.228.
10) “Investigation of current conduction mechanism in HfO2 thin film on silicon substrate”, Anil G. Khairnar, K. S. Agrawal, V. S. Patil and A. M. Mahajan, presented in IWPSD-2013 held at Amity University, Noida, Uttar Pradesh during December 10-13, 2013.
11) “Capacitance-Voltage measurement of SiO2/GeOxNy gate stack on surface passivated germanium”, Anil G. Khairnar and A. M. Mahajan, presented in IWPSD-2013 held at Amity University, Noida, Uttar Pradesh during December 10-13, 2013.
12) “Surface passivation of germanium using NH3 ambient in RTP for high mobility MOS structure”, Anil G. Khairnar, Y. S. Mhaisagar and A. M. Mahajan, presented and published inproceedings of Second International Symposium on Semiconductor Materials and Devices (ISSMD-2) held at University of Jammu, India during31 Jan-2 Feb 2013on pp. 255-258.
13) “Effect of surface modification on properties of silica low-k thin films for nanoelectronics applications”, Y. S. Mhaisagar, A.S. Gaikwad, Anil G. Khairnar, and A. M. Mahajan, presented and published in proceedings of Second International Symposium on Semiconductor Materials and Devices (ISSMD-2) held at University of Jammu, India during 31 Jan-2 Feb 2013 on pp. 259-261.
14) “Conceptual designing of atomic layer deposition system for deposition of high dielectric constant thin films”, V. S. Patil, K. S. Agrawal, Anil G. Khairnar, L. S. Patil and A. M. Mahajan, presented in National Seminar on “Advances in Nano-structured Materials and their Applications” held at Department of Physics, A.S. Mandals Arts and Commerce College Trusts, C.H.C. Arts, S.G.P. Commerce and B.B.J.P. Science College Taloda, Dist. Nandurbar (M.S.) – 425413 India during 22-23 January 2013 abstract published on pp.49.
15) “Sol-gel derived TiO2 thin films deposited on silicon and glass substrates”, Sunil N. Bhakade, Dipak N. Jawale, Anil G. Khairnar, L. S. Patil and A. M. Mahajan, presented in National Conference on IDRIS 2012at ACS College, Navapur during 6-7 Oct. 2012, abstract published on pp. 37.
16) “Cerium dioxide thin films deposited on silicon and glass substrates using sol-gel method”, Dipak N. Jawale, Priyanka P. Patil, Anil G. Khairnar, L.S. Patil and A. M. Mahajan, presented in National Conference on IDRIS 2012 at ACS College, Navapur during 6-7 Oct. 2012, abstract published on pp. 32.
17) “Fabrication and Electrical characterization of novel Pt/Ti/ALD ZrO2/ n-Ge MOS capacitors”, A. M. Mahajan, Anil G. Khairnar, Brian J. Thibeault, presentedinICFSI-13 held at Prague, Czech Republic, during 3-8, July- 2011 and published in abstract book on pp-179 paper ID-17501.
18) "Cerium oxide dielectric thin film for nanoelectronics devices", Naeem H. Momin, Megha B. Patil, Anil G. Khairnar, Pravin Tirmali, A.M. Mahajan, Presented and published in national conference NCNN-2011 , North Maharashtra University, Jalgaon held on 19thMarch 2011.
19) “Fabrication and characterization of Al/HfO2/Si MOS capacitor for future technology” Anil G. Khairnar, Pravin M. Tirmali , A. M. Mahajan, Presented and published in national conference on “Materials & Devices for Future Technology, North Maharashtra University, Jalgaon held on 7th March 2011.
20) “Analysis of capacitance voltage measurement of the fabricated MOS capacitors for advanced CMOS technology”, Megha B. Patil, Naeem H. Momin, Anil G. Khairnar, Pravin Tirmali, A.M. Mahajan, Presented and published in national conference on “Materials & Devices for Future Technology, North Maharashtra University, Jalgaon held on 7th March 2011.
21) “Effect of annealing temperature on transmittance of the CeO2 thin films”, Naeem H. Momin, Megha B. Patil, Gitali Mapari, Anil G. Khairnar, Pravin Tirmali, A.M. Mahajan, Presented and published in national conference on “Materials & Devices for Future Technology, North Maharashtra University, Jalgaon held on 7th March 2011.
22) “Design and development of RTP system for rapid thermal annealing in device fabrication technology”, Anil Sonawane, Bhushan Pawar, Chetan Kasar, Anil G. Khairnar, Y. Mhaisagar and A. M. Mahajan, Presented and published in national conference on “Materials & Devices for Future Technology, North Maharashtra University, Jalgaon held on 7th March 2011.
23) “Pt-Ti/ALD-Al2O3/p-Si MOS capacitors for future ULSI technology”, A.M. Mahajan, Anil G. Khairnar, Brian J. Thibeault, presented and published in proceedings of International Symposium on Semiconductor Materials and Devices (ISSMD 2011)held at The M. S. University of Baroda, Vadodara, during 28-30, January 2011”.
24) Deposition and characterization of cerium oxide thin films, Naeem H. Momin, Megha B. Patil, Anil G. Khairnar and A. M. Mahajan, Presented and abstract published in national conference NCRMS-2011, Bhusawal during 22-23 Jan 2011.
25) “Cerium dioxide high-k thin films derived from sol gel route as a gate dielectric in advanced high-k/metal gate stack”, Anil G. Khairnar, Vijaya B. Toke and A.M. Mahajan, presented and published in Material Research Symposium (MRS-2010) held at San Fransico, CA,USA during April 2010 on pp. 125.
26) “High dielectric oxide for carrier mobility enhancement of pentacene based thin film transistor”, Anil Khairnar, Pravin Tirmali, Priti Borkar and A. M. Mahajan, Presented and published in Emerging trends in materials science and communications (ETMSC-2010) held at Department of Physics, Mahatma Gandhi Mahavidyalaya , Ahmedpur, Dist: Latur (MS) during 13th-14thMarch 2010 on pp. 103.
27) “Optical properties of Ceria thin film by spray pyrolysis technique”, Pravin M. Tirmali, Anil G. Khairnar, Ratnamala Chadwadkar, Bhagyashree Wagh, and A. M. Mahajan Bio-nano Frontiers special issue on Advancement in nanoscience for different technologies (2010) pp. 198-200.
28) “Synthesis of Cerium dioxide thin films as high-k gate oxide for ULSI technology”, Anil G. Khairnar, Bhagyashree Wagh, Pravin M. Tirmali and A. M. Mahajan Bio-nano Frontiers special issue on Advancement in nanoscience for different technologies (2010) pp. 136-139.
29) “Sol gel spin coated cerium dioxide thin films as gate oxide for CMOS technology”, Bhagyashree Wagh, Ratnamala Chadwadkar, Anil G. Khairnar, Vijaya Toke and A. M. Mahajan, presented and published in abstract book of National conference on materials for energy storage and conversion (NCMESC-2010) held at Department of Physics, ShriVenkateshwara University, Tirupati during 23rd -24th Jan. 2010 on pp.24.
30) “Preparation and characterization of CeO2 thin films deposited by spray pyrolysis technique”, Ratnamala Chadwadkar, Bhagyashree Wagh, Anil G. Khairnar, Pravin Tirmali and A. M. Mahajan, presented and published in abstract book of National conference on materials for energy storage and conversion (NCMESC-2010) held at Department of Physics, Shri Venkateshwara University, Tirupati during 23rd -24th Jan. 2010 on pp. 22.
“Influence of catalyst concentration on EOT of CeO2 for advanced gate stack technology”, Anil G. Khairnar and A. M. Mahajan, presented and published in proceedings of International Conference on MEMS and optoelectronics technology (ICMOT -2010) held at Swarnandhra College of Engineering and Technology, Narsapur during 22nd-23rdJan. 2010 on pp. 80.